process
Fast deposition speed
Cheap process device
1. Partially different thickness
2. Difficult to control the element ratio
3. Hard to deposition the complex material layer
4. Low film quality
3.Material to be evaporated by e-beam
- E-beam dashes against
material
- E-beam transport energy
to the material
- Then evaporation process
is start
An organic light emitting diode (OLED) is a solid state device like the LED but composed of several layers in which the emissive electroluminescent layer is a film of organic compounds which emit light in response to an electric current.
Function of each part
Cathode : injecting electron composed of metal
Anode : injecting hole composed of transparent ITO
Emissive polymer : reco
3.Result and Discussion
Fig. 1 shows the XRD patterns from the as-grown films. There is no new peak appearing when RF power of Ge is 0 W except for three peaks of ZnO (1 0 0), (0 0 2)and (0 0 4) located at 2θ = 30.888, 34.218, and 72.138, respectively. At RF power 100 W, these three peaks shift toward larger angle apparently and their intensity has also enhanced slightly. This indicates tha
films formed by stepwise self-assemblyof ~6 nm Au particles and organic di- thiol on mercaptosilane-functionalized glass substrates. The thin films produced have been studied by UV/Vis spectroscopy, ellipsometry, scanning tunneling microscopy, and temperature-dependent conductivity measurements. The results show that the Au parti- cles are well-protected by the dithiol linker molecules and do not
문제가 되는 반대쪽 전극의 손상이나 파티클 발생 등의 문제 해결 가능
1015 ions/cm2 이 300~ 700 eV 의 energy 로 표면과 충돌할 때 substrate 표면파괴 및 화학적인 오염이 심각함
residual film 형성
gas phase particle deposition
metallic impurities
불순물 제거 방법 : 습식 산화 제거에 의한 산소 또는 수소 plasma 처리